Refurbished Veeco Ion Beam System
IBE RF350 -w/Rack Loader
Includes:
Refurbished Process Module, RF350-IBE (QTY 1)
Polished stainless steel chamber including:
One set of chamber liners and shields
Two service access doors:
(1) Source door
(1) Access door
Shuttered viewport
Control System and software:
New Pentium based MS Windows control systems w/GUI interface：
CTC Computer with CTC s/w
PM Computer with PM s/w
Tested power supplies:
PBN Power Supplies:
1) Body: SORENSON DCS60-18E
2) Discharge: SORENSON DCS600-1.75E
Ion Source Power Supplies:
1) Suppressor: SPELLMAN SL300
2) Beam: SPELLMAN SL1200
3) RF: AE RFPP 20M
Tested Galil motion control
Tested system utility panel for air, water, N2 and He control
Tested AC power distribution system
Tested distributed I/O architecture
Process Module Vacuum System
Refurbished turbo molecular pump with VAT isolation valve:
Oerlikon Leybold Vacuum Mag2000
Four gas channels with tested Device-net MFCs and pneumatic valves:
One for Flow-cool gas(Helium)
One for PBN Gas(Argon)
Two for Ion Source(Argon, optional)
One refurbished dry pump: Leybold 100 Dry Pump
Flow-cool pump: Vacuubrand MZ-2T
Refurbished Ion Source
Tested RIM-350 source quartz
Refurbished RF350 5-Zone Grid
Refurbished water-cooling filamentless PBN
Refurbished Substrate Fixture
Std. Flowcool fixture with clamp, rotation(3-10 RPM), tilt and theta sweep
Backside substrate cooling system with Veeco patented FlowcoolTM technology
One set new 6” fixture tooling for substrate handling with tooling
Tested water cooled chiller and by-pass kit:
Mechanical source shutter
Refurbished Manual Rack Loader for single 6” wafer
TM/CTC Computer with TMflex and CTCflex
One (1) tested vacuum loader chamber with one transfer arm and wafer seat configured for 6-inch wafer size
Vacuum system:One tested mechanical pump: Laybold D65B
Additional Standards:
SEMI S2/S8 Compliance
Options:
System Warranty:
3-month warranty including parts (excluding consumables) and labor
Upgrade and Modification
Upgrade to support 8” wafer
Modify to Filament PBN
Upgrade computers and OS to Win 7 or Win 10 to support the latest versions of PM, CTC and TM.
