Current Condition: Good
Completeness: Very Good. Missing parts: Lower Lock Plate, clean room table; BF3-High-Pressure Gauge; Chiller(only Heat exchanger)
Manufacturing date of the Equipment: 1995 Date of first usage: 1999
Technic special customized for customer: some minor modifications: Upper-Lock; Xfer-Arm; E-Shower Controller; Flow-Switch; Barcode-Reader; ELS4-Source; Chiller
Correct maintained: yes
Any damages/deficits known: transformer only 200kv Current storage location/storage condition: warm tool Last time in production: January 2021
Wafer size: 8inch
Any refurbishments done: accel column refurb in June/2018 Used: 7x24
Any contaminations known: Boron + Phosphine + Arsine
Type: NV8200P Dose2 Block3
Energy Config: 0 - 250Kv Mid-Current Serial number: 827
Build Year: 1995 CE-Conformity: Yes
Cryo-Pumps: 3x CTI Onboard 8
Cryo-Compressor: CTI 9650 Low-Voltage
Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C
Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250 Wafer size: 8inch(200mm)
Clamp-Type: E-Chuck with Non-μC Controller
Wafer-Cooling: Galden HT110 with 20 degree Heat exchanger Gasbox: 3x Toxic 0,5L Size
String1: Argon Carrier gas; SEC-4400
String2: BF3 SDS-Low-Pressure Type VCR 1/4"; Brooks String3: PH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 String4: AsH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 Beam-Profiler Type: Belt-Drive
Gear-Type's: Scan: Harmonic Tilt: Harmonic Source-Type: ELS4 IHC-Source without Vaporizer HV-Transformer: Mineral-Oil
Light-Tower: red/yellow/green; no buzzer Main-Workstation Solaris SUN AXI 4HE Second-Workstation Solaris SUN Sparc5 Software-Version: 5.1.4.1
Network: 24port 100MB Ethernet with XXXXXX Router-Kit Cell-Controller: 177 Type
