|
Tool ID |
X18v |
|
Tool Status |
Running Wafers |
|
Location |
Burlington, USA |
|
Wafer Size |
200 mm |
|
Fab Section |
Lithography |
|
Tool Available Date |
2022-04-30 |
|
Vendor Supplier |
Nikon Precision |
|
Model |
S203B |
|
Vintage |
1999 |
|
Serial No |
7776022 |
|
Asset Description |
DUV Nikon S203B |
|
Software Version |
MCSV Ver.S343, OCSV Ver.S343, TOOL Ver.S371 |
|
CIM |
SECS, GEM |
|
Process |
DUV Lithography |
|
System Type |
Description |
Quantity |
Status |
|
Main System |
Nikon DUV S203B |
1 |
OK |
|
Handler System |
Type 3 |
1 |
OK |
|
Factory Interface |
Open Cassette |
1 |
OK |
|
Options System |
|
|
|
|
Others |
|
|
|
Tool Pictures
|
X18v Lens Performance Data collected within past 12months |
|
|
IU Flare |
0.77 |
|
Lens Flare |
5.5 |
|
Uniformity |
0.057 |
|
Power |
353mW |
|
Total Focus Deviation |
0.108 µm |
|
Astigmatism |
0.5 µm |
|
Coma |
0.091 µm |
|
Iso DOF |
0.277 µm |
|
Distortion |
0.028 µm |
